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Seminductor processing application
日期:2010/1/13

Universal RF generator and Auto-match matching system provide frequency rang from 1MHz to 162MHz , power range from 100W to 10KW, with frequency range from 0 to 20KHz pulse modulation for seminducto and thin film solar processing such as plasma etching, PECVD, ICP, RIE, CVD, PVD RF laser and ect.

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