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Linear High-Power Amplifier
Universal RF Generator
·Universal 0613
·Universal 1013
·Universal 2013
·Universal 3013
·Universal 5013
·Universal 0627
·Universal 1027
·Universal 3027
·Universal 1040
·Universal 4040
·Universal 1060
·Universal 2060
·Universal 1081
·Universal 2081
Auto-Match Matching Network
·Auto-Match 0613
·Auto-Match 1513
·Auto-Match 5013
·Auto-Match 0627
·Auto-Match 1527
·Auto-Match 3027
·Auto-Match 2040
·Auto-Match 5040
·Auto-Match 2060
·Auto-Match 2081

 

 

 
 
 
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Universal RF Generator employ all-solid-state separate-excited RF amplifier technology, frequency range from 1MHz to 400MHz, power range from 100W to 10kW. it is a versatile new generation of RF generator designed for seminductor manufacture process and thin-film solar manufacture process, the mainly application include PECVD,RIE, RF bias, mult-state plasma, CO2 laser and general plasma process and seminductor process.The advanced all-solid-state separate-excited technology has introduced long life and perfect stability to Universal RF Generator.

Generator Research Technologies Ltd. provided special building products per customer's request, and power up to 10kW, frequency range from 1MHz to 400MHz.
Universal RF Generator has the following two control modes.
1. Local Control (using the potentiometer on the front panel and LED display)
2. Remote Control(using Analog I/O connector for remote control)
Universal RF Generator has the following types;

Universal 0613    13.56MHz    600W


Universal 1013    13.56MHz    1000W


Universal 2013    13.56MHz    2000W


Universal 3013    13.56MHz    3000W


Universal 5013    13.56MHz    5000W


Universal 0627    27.12MHz    600W


Universal 1027    27.12MHz    1000W


Universal 3027    27.12MHz    3000W


Universal 1040    40.68MHz    1000W


Universal 4040    40.68MHz    4000W


Universal 1060    60MHz       1000W


Universal 2060    60MHz       2000W


Universal 1081    81.36MHz       1000W


Universal 2081    81.36MHz        1000W

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